TEL Tokyo Electron 3281-000172-13輸入/輸出接口 PDF資料
1.產 品 資 料 介 紹：
中文資料：
Tokyo Electron 3281-000172-13 輸入/輸出接口模塊 — 產品應用領域
該模塊是Tokyo Electron（TEL）用于半導體制造設備中的一種關鍵電子組件，主要負責控制系統(tǒng)與現場設備之間的輸入與輸出信號交互。其典型應用領域包括以下幾方面：
半導體制造設備控制系統(tǒng)
用于各種半導體設備，如刻蝕機、CVD（化學氣相沉積）、PVD（物理氣相沉積）、清洗機和擴散爐中，實現對工藝流程中各類傳感器、執(zhí)行器、電磁閥等部件的數字/模擬信號輸入輸出。設備內部信號集成接口
作為主控制板和外圍功能模塊（如真空泵控制、電源監(jiān)控、運動控制系統(tǒng)）之間的數據通道，實現穩(wěn)定快速的數據通信。自動化系統(tǒng)中的I/O控制
應用于TEL設備自動化控制系統(tǒng)中，如真空艙體開關控制、氣體流量調節(jié)、電源狀態(tài)監(jiān)控等場景。設備狀態(tài)監(jiān)測與遠程診斷
支持輸入/輸出狀態(tài)采集，配合TEL上位機診斷系統(tǒng)用于故障檢測和預防性維護。晶圓搬運與處理系統(tǒng)
可用于控制晶圓搬運裝置、對準系統(tǒng)或傳送系統(tǒng)，實現信號控制與位置確認反饋。潔凈室設備接口擴展
適用于位于潔凈環(huán)境中的模塊化生產設備，通過該接口模塊實現設備間模塊通信、環(huán)境參數采集及信號同步。
英文資料：
Tokyo Electron 3281-000172-13 Input/Output Interface Module - Product Application Fields
This module is a key electronic component used by Tokyo Electron (TEL) in semiconductor manufacturing equipment, mainly responsible for the input and output signal interaction between the control system and field devices. Its typical application areas include the following:
Semiconductor manufacturing equipment control system
Used in various semiconductor devices, such as etching machines, CVD (chemical vapor deposition), PVD (physical vapor deposition), cleaning machines, and diffusion furnaces, to achieve digital/analog signal input and output of various sensors, actuators, solenoid valves, and other components in the process flow.
Internal signal integration interface of the device
As a data channel between the main control board and peripheral functional modules (such as vacuum pump control, power monitoring, motion control system), it achieves stable and fast data communication.
I/O Control in Automation Systems
Applied in TEL equipment automation control systems, such as vacuum chamber switch control, gas flow regulation, power status monitoring, and other scenarios.
Equipment status monitoring and remote diagnosis
Support input/output status collection, in conjunction with TEL upper computer diagnostic system for fault detection and preventive maintenance.
Wafer Handling and Processing System
Can be used to control wafer handling devices, alignment systems, or conveyor systems, achieving signal control and position confirmation feedback.
Expansion of cleanroom equipment interfaces
Suitable for modular production equipment located in clean environments, this interface module enables inter device module communication, environmental parameter acquisition, and signal synchronization.
2.產 品 展 示
3.其他產品
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4.其他英文產品
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RADISYS 451558-004 Communication Module
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| PMB31D-10100-01 | IMFAI01 | 3BUP001191R1 CI545V01 |
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