AMAT Applied Materials 0500-01065 接口模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
AMAT Applied Materials 0500-01065 接口模塊
產(chǎn)品應(yīng)用領(lǐng)域
一、半導(dǎo)體制造設(shè)備平臺(tái)
主要應(yīng)用在 AMAT Centura 系列 300 mm 工藝平臺(tái)。
屬于多腔室設(shè)備中的 Loadlock（載入鎖艙）接口互鎖模塊，負(fù)責(zé)大氣與真空腔體之間的安全過(guò)渡。
二、核心應(yīng)用場(chǎng)景
晶圓傳輸過(guò)程
控制和監(jiān)測(cè) Loadlock 艙門(mén)的開(kāi)關(guān)狀態(tài)。
在晶圓由搬運(yùn)機(jī)器人轉(zhuǎn)入或轉(zhuǎn)出腔體時(shí)，確保只有在門(mén)完全關(guān)閉、真空狀態(tài)滿足要求的條件下，操作才允許進(jìn)行。
真空與大氣隔離
監(jiān)控 Loadlock 內(nèi)部壓力與工藝腔體壓力差，確保壓力達(dá)到安全范圍后才允許開(kāi)啟閥門(mén)。
提供與真空泵、閥門(mén)的互鎖邏輯，避免誤操作造成真空失效。
安全互鎖邏輯
當(dāng)檢測(cè)到門(mén)未鎖緊、壓力不平衡或傳感器異常時(shí)，阻止腔體與外界或其他腔室的直接連通。
提供保護(hù)邏輯，避免晶圓污染或設(shè)備損壞。
信號(hào)接口功能
作為 Loadlock 與主控制器（PLC/系統(tǒng)控制計(jì)算機(jī)）之間的 I/O 接口板，傳遞門(mén)鎖狀態(tài)、傳感器反饋及執(zhí)行信號(hào)。
負(fù)責(zé)接口信號(hào)的采集與轉(zhuǎn)換，保障控制系統(tǒng)及時(shí)響應(yīng)。
三、典型應(yīng)用領(lǐng)域
CVD（化學(xué)氣相沉積）設(shè)備：用于薄膜沉積工藝前后的晶圓裝卸與過(guò)渡。
PVD（物理氣相沉積）設(shè)備：在濺射鍍膜設(shè)備中作為大氣與真空腔室的中間過(guò)渡模塊。
刻蝕設(shè)備：保證晶圓在轉(zhuǎn)入高真空刻蝕腔前完成安全隔離。
清洗/表面處理設(shè)備：在需要頻繁進(jìn)出晶圓的工藝中，確保載入過(guò)程不影響真空工藝環(huán)境。
四、產(chǎn)品優(yōu)勢(shì)（對(duì)應(yīng)應(yīng)用）
提高 安全性：通過(guò)硬件互鎖邏輯降低操作風(fēng)險(xiǎn)。
保證 工藝穩(wěn)定性：避免因壓力或門(mén)鎖異常影響薄膜沉積、刻蝕等關(guān)鍵步驟。
增強(qiáng) 設(shè)備可靠性：作為標(biāo)準(zhǔn)化接口模塊，可快速更換，減少停機(jī)時(shí)間。
支持 自動(dòng)化生產(chǎn)：配合晶圓搬運(yùn)機(jī)器人實(shí)現(xiàn)高效無(wú)誤的晶圓傳輸。
AMAT Applied Materials 0500-01065 接口模塊 英文資料：
AMAT Applied Materials 0500-01065 Interface Module
Product application areas
1、 Semiconductor Manufacturing Equipment Platform
Mainly used in the AMAT Centura series 300 mm process platform.
The Loadlock interface interlock module belonging to multi chamber equipment is responsible for the safe transition between atmospheric and vacuum chambers.
2、 Core application scenarios
Wafer transfer process
Control and monitor the switch status of the Loadlock cabin door.
When the wafer is transferred into or out of the chamber by the handling robot, ensure that the operation is only allowed when the door is completely closed and the vacuum state meets the requirements.
Vacuum and atmospheric isolation
Monitor the pressure difference between the internal Loadlock and the process chamber to ensure that the pressure reaches a safe range before allowing the valve to be opened.
Provide interlocking logic with vacuum pumps and valves to avoid vacuum failure caused by misoperation.
Security interlock logic
When the door is not locked, the pressure is unbalanced, or the sensor is abnormal, prevent direct communication between the chamber and the outside or other chambers.
Provide protection logic to prevent wafer contamination or equipment damage.
Signal interface function
As an I/O interface board between Loadlock and the main controller (PLC/system control computer), it transmits door lock status, sensor feedback, and execution signals.
Responsible for collecting and converting interface signals to ensure timely response of the control system.
3、 Typical application areas
CVD (Chemical Vapor Deposition) equipment: used for wafer loading, unloading, and transition before and after thin film deposition processes.
PVD (Physical Vapor Deposition) equipment: used as an intermediate transition module between atmospheric and vacuum chambers in sputtering coating equipment.
Etching equipment: Ensure that the wafer is safely isolated before being transferred to the high vacuum etching chamber.
Cleaning/surface treatment equipment: Ensure that the loading process does not affect the vacuum process environment in processes that require frequent entry and exit of wafers.
4、 Product advantages (corresponding applications)
Improve security: Reduce operational risks through hardware interlock logic.
Ensure process stability: avoid key steps such as film deposition and etching being affected by pressure or abnormal door locks.
Enhance device reliability: As a standardized interface module, it can be quickly replaced to reduce downtime.
Support automated production: collaborate with wafer handling robots to achieve efficient and error free wafer transfer.
AMAT Applied Materials 0500-01065 接口模塊 產(chǎn)品展示
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| T21NLLC-LNN-NS-00 | CACR-SR15BB1CS | 6ES5441-8MA11 |
| T Series | CACR-SR30SF1BSB-Y124 | UIMC |
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